Detection of ultrathin biological films using vacuum ultraviolet spectroscopic ellipsometry
نویسندگان
چکیده
منابع مشابه
Progress in spectroscopic ellipsometry: Applications from vacuum ultraviolet to infrared
Spectroscopic ellipsometry ͑SE͒ is a noncontact and nondestructive optical technique for thin film characterization. In the past 10 yr, it has migrated from the research laboratory into the semiconductor, data storage, display, communication, and optical coating industries. The wide acceptance of SE is a result of its flexibility to measure most material types: dielectrics, semiconductors, metals...
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ژورنال
عنوان ژورنال: Materials Science and Engineering: B
سال: 2008
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2007.11.034